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1 reactive-ion beam
пучок хімічно активних іонівEnglish-Ukrainian dictionary of microelectronics > reactive-ion beam
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2 beam
промінь; пучок - excimer beam
- Gaussian beam
- impurity-ion beam
- Kauffman ion beam
- microfocused ion beam
- molecular beam
- oxigen plasma beam
- plasma beam
- reactive-ion beam
- shaped beam -
3 etching
травлення (див. т-ж etch) - anisotropic etching
- anode etching
- batch etching
- blanket etching
- chemically assisted etching
- concentration dependent etching
- crystallographically sensitive etching
- deep reactive ion etching DRIE
- deep reactive ion etching
- differential etching
- digital etching
- diode ion etching
- diode etching
- dip etching
- directional etching
- dislocation etching
- dry process etching
- dry etching
- electron-beam induced etching
- excessive etching
- exciraer laser etching
- gas-phase plasma-assisted etching
- high-frequency ion etching
- hydrogen reactive ion etching
- ion etching
- ion-assisted plasma etching
- ion-beam induced etching
- isotropic etching
- jet etching
- laser-enhanced etching
- laser-induced pattern projection etching
- laser radical etching
- lateral etching
- lift-off etching
- light-induced etching
- low-pressure plasma etching
- low-pressure etching
- masked etching
- maskless etching
- maskless laser etching
- mesa etching
- microwave plasma etching
- microwave etching
- mild etching
- nonundercutting etching
- orientation-dependent etching
- oxygen gas plasma etching
- permeation etching
- photochemical etching
- photoelectrochemical etching
- photo-enhanced chemical dry etching
- photoexcited etching
- photo-initiated etching
- photoresist-masked etching
- plasma reactor etching
- plasma etching
- post etching
- preferential etching
- radical plasma etching
- radical etching
- radio-frequency plasma etching
- reactive ion etching
- regenerative etching
- resistless etching
- selective etching
- sharp etching
- sideways etching
- single-step laser etching
- spray etching
- sputter etching
- steady-state etching
- synchrotron radiation-assisted etching
- taper etching
- tetrode ion etching
- tetrode etching
- triode ion etching
- triode etching
- undercuttingetching
- undercutetching
- UV laser etching
- vacuum ultraviolet-assisted etching
- vertical etching
- VUV-assisted etching
- wet chemical etching
- wet etching
- zero-undercut etching -
4 deposition
осадження - blanket deposition
- chemical deposition
- chemical vapor deposition
- diffusional deposition
- dynamic deposition
- electrochemical deposition
- electroless deposition
- electrolythic deposition
- electron-beam deposition
- epitaxial deposition
- evaporation deposition
- evaporative deposition
- excimer-induced deposition
- film deposition
- gas deposition
- glow-discharge deposition
- high-rate deposition
- ion-beam induced deposition
- ion-beam deposition
- ionized-cluster beam deposition
- laser gold deposition
- laser-induced deposition
- laser photo-assisted deposition
- laser photochemical deposition
- localized electrochemical deposition LED
- localized electrochemical deposition
- low-pressure chemical vapor deposition LPCVD
- low-pressure chemical vapor deposition
- low-temperature vapor deposition
- metal deposition
- metall-organic deposition
- microcrystalline like deposition
- microwave plasma reactive vapor deposition
- molecular-beam deposition
- multiple-stage deposition
- oblique deposition
- open-tube deposition
- photochemical deposition
- photo-initiated deposition
- photolytic deposition
- photon-controlled deposition
- physical vapor deposition
- plasma-assisted laser deposition
- pyrolytic deposition
- serigraphic deposition
- sputter deposition
- static deposition
- thin-film deposition
- vacuum vapor deposition
- vapor-phasedeposition
- vapordepositionEnglish-Ukrainian dictionary of microelectronics > deposition
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5 sputtering
розпилювання Процес випуску атомів або групи атомів з поверхні катода (негативного електроду) у вакуумній трубці як результат дії важких іонів. Цей процес використовується для осадження тонкого шару металу на скло, пластик, метал або іншу поверхню у вакуумі - bulk sputtering
- cathode sputtering
- dc sputtering
- diode sputtering
- high-rate sputtering
- ion-beam sputtering
- laser sputtering
- magnetron sputtering
- physical sputtering
- plasma sputtering
- radio-frequency cathode sputtering
- reactive sputtering
- RF sputtering
- secondary sputtering
- thin-film sputtering
- triode sputteringEnglish-Ukrainian dictionary of microelectronics > sputtering
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6 evaporation
1) напилення, термовакуумне випаровування 2) випаровування - angle evaporation
- e-beam electron-beam evaporation
- e-beam evaporation
- electron-beam evaporation
- flash evaporation
- ion evaporation
- ion-enhanced evaporation
- laser-beamevaporation
- laser-evaporation
- metal evaporation
- oblique evaporation
- splash-free evaporation
- thermal evaporation
- thin-film evaporation
- vacuum evaporationEnglish-Ukrainian dictionary of microelectronics > evaporation
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